| Recognized Header Tag | Description |
|---|
| WAFER_ID | Wafer ID; What is scribed on wafer. |
| LOT_ID | Lot ID for this batch of wafers |
| DEVICE_ID | Device or Product ID |
| WAFER_SIZE | wafer dia. for circular wafers |
| ORIGIN_LOCATION | format specific origin location |
| FLAT | flat or notch location |
| DEVICE_X | device width |
| DEVICE_Y | device height |
| STEP_X | step pitch along X |
| STEP_Y | step pitch along Y |
| NULL_BIN | bin code for no die present |
| DATE | Format specific date string |
| TIME | Format specific time string |
| ROWS | number of rows in the array |
| COLUMNS | number of columns in the array |
| UNITS | units used to define wafer and other physical distances |
| REF_DEVICE_COL | The array position of the reference die in X |
| REF_DEVICE_ROW | The array position of the reference die in Y |
| BINS | A list of pass bins |
| SKIP_BINS | A list of skip bins |
| TESTER_ID | tester identification |
| FRAME_ROTATION | frame rotation (or orientation) |
| PROCESS_STATUS | process status |
| WAFER_NUMBER | wafer number |
| CASSETTE_NUMBER | cassette number |
| SLOT_NUMBER | slot number |
| TEST_NUMBER | test number |
| START_TIME | start time |
| END_TIME | end time |
| OFFSET_DEVICE_X | offset device X coord |
| OFFSET_DEVICE_Y | offset device Y coord |
| OPERATOR_NAME | operator name |
| MACHINE_NUMBER | machine number |
